Development of a Novel Fiber-Coupled Three Degree-of-Freedom Displacement Interferometer

نویسندگان

  • Steven R. Gillmer
  • John Lambropoulos
چکیده

Heterodyne displacement interferometry is a widely accepted methodology capable of measuring displacements with sub-nanometer resolution. The objective of this thesis is to demonstrate a compact, fiber-delivered displacement measuring interferometer which can be used to simultaneously calibrate the linear motion and rotational errors of a translating stage using a single measurement beam. Heterodyne interferometry is ideal for this type of high resolution stage feedback sensing because of its high dynamic range, high signal-to-noise ratio, and direct traceability to the meter. There are a variety of benefits to fiber-delivered interferometers for stage metrology. First, the interferometer alignment is decoupled from the laser alignment. The overall setup can be divided into subsystems to more easily identify and rectify misalignments. Simplified alignment and division into subsystems increases the stability of the structure because the metrology footprint is significantly reduced. Many beam routing optics can be eliminated and the heterodyne laser (a heat source) can also be isolated from the stage measurement site. Ongoing work towards a compact, three degree-of-freedom fiber-delivered heterodyne interferometer will be presented. This novel interferometer utilizes differential wavefront sensing to measure target mirror displacement, pitch, and yaw. Differential wavefront sensing uses a quadrant photodiode to measure four

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تاریخ انتشار 2013